SPIE Advanced Lithography 2027
Event Date
February 21–25, 2027
Location
San Jose, CA
About This Show
AI-drafted summarySPIE Advanced Lithography + Patterning is the premier annual event for the lithography and patterning community within the semiconductor industry. It is the premier event for the lithography and patterning community, bringing together researchers, engineers, and industry leaders to explore the cutting edge of lithography and patterning technologies and shape the future of the semiconductor industry. The technical program spans optical lithography, EUVL, patterning technologies, metrology, and process integration for semiconductor manufacturing and related applications.
The event draws a global audience of scientists, engineers, product developers, and business professionals from both academia and industry. This annual event attracts experts from academia and industry who are dedicated to addressing the specific challenges of the semiconductor industry. Nearly half of total attendees hold R&D and product development roles.
Beyond technical sessions, the week combines presentations, short courses, networking, and a technical exhibition. It is a great opportunity to learn from the world's leading experts in the field, network with peers, and see the latest products and services from industry vendors. Held in the heart of Silicon Valley, it offers unmatched proximity to the companies driving semiconductor innovation.
Show Highlights
- Technical program: presentations covering optical lithography, EUV lithography, patterning technologies, metrology, inspection, process control, and design/process integration.
- Short courses: technical courses ranging from lithography fundamentals to emerging approaches. Technical short courses on topics ranging from lithography fundamentals to emerging approaches including Directed Self Assembly (DSA) and EUV lithography.
- Exhibition: SPIE Advanced Lithography + Patterning presents an important exhibition in the semiconductor industry where people from across the globe find new products and make business connections. Solutions on display include photoresist, EUV, and other specialty materials; e-beam lithography systems; precision cleaning, contamination, and transport support materials; and wafer treatments and substrates.
- Student engagement: The event offers numerous opportunities for students to engage with and learn about the semiconductor industry and share their latest research in lithography and photomask technologies, with leading companies supporting student participation through grants and awards, and tech groups offering scholarships for graduate and undergraduate applicants.
- Networking: plenary presentations, poster sessions, and dedicated networking events including a Welcome Reception.
Attendance
According to third-party event listings, the conference historically draws a large international audience. More than 4,000 attendees and about 50 exhibitors, representing researchers and managers working in lithography, have participated. In terms of audience makeup, nearly half of total attendees hold R&D and product development roles.
Registration
Registration is handled through the official SPIE website, with several pass types available.
- Exhibition-only visitors: If you would like to only attend the exhibition, the exhibition visitor registration is free and required.
- Paid conference registration: Entrance into the exhibition is already included with all paid registration types, and no additional registration is needed. All paid conference registrations include proceeding downloads and ongoing access through your SPIE account.
- Courses: Courses are priced separately; course-only registration includes your selected course(s), course notes, coffee breaks, and admittance to the exhibition.
- Member discounts: SPIE Members receive conference and course registration discounts, which are applied at the time of registration.
- Guest tickets: Guest admission tickets for the Welcome Reception can be purchased separately during the registration process.
International attendees should plan ahead: if traveling from outside the US, start processing paperwork early, and request an invitation letter and apply for a visa if needed.
History
The event is organized by SPIE, the international society for optics and photonics. SPIE, the international society for optics and photonics, brings engineers, scientists, students, and business professionals together to advance light-based science and technology, and the Society was founded in 1955. Over the past five years, SPIE has invested more than $25 million in the international optics community through advocacy and support, including scholarships, educational resources, and travel grants.
The conference has been held annually at the San Jose McEnery Convention Center for many years, recently rebranded as "Advanced Lithography + Patterning." Recent editions include 23–27 February 2025 and 22–26 February 2026, both in San Jose. SPIE Advanced Lithography 2025 was held 23-27 Feb 2025 and the 2026 edition 22-26 Feb 2026, both at the San Jose McEnery Convention Center, California.
Frequently Asked Questions
When and where is SPIE Advanced Lithography + Patterning 2027?
The 2027 event takes place February 21-25, 2027, at the San Jose McEnery Convention Center, located at 150 W San Carlos Street, San Jose, California. The exhibition portion runs February 23-24, 2027.
Who should attend SPIE Advanced Lithography + Patterning?
The event is designed for researchers, engineers, product developers, and business professionals from both academia and industry working in lithography and patterning for the semiconductor field. Nearly half of attendees hold R&D and product development roles, and students are also encouraged to attend and present research.
How do I register for the event?
Registration is available through the official SPIE website. Exhibition-only visitor registration is free but required, while paid conference registration includes exhibition entry plus access to proceedings, and short courses are priced separately. SPIE members receive registration discounts.
What topics does the technical program cover?
The program covers optical lithography, EUV lithography, patterning technologies, metrology, inspection, process control, and design and process integration for semiconductor manufacturing. Technical short courses range from lithography fundamentals to emerging approaches such as Directed Self Assembly and EUV lithography.
What are the transportation and parking options for the venue?
San Jose International Airport (SJC) is about three miles away, and the VTA Convention Center Station stops directly in front of the venue with Green and Blue Line service. The convention center has an underground parking garage with a daily maximum of roughly $25-30, and event flat rates up to $25 may apply.
From the blog
Recent guides and industry insights for exhibitors and planners.
August 6, 2026Trade Show Lead Capture: What Actually Works
Why scan counts mislead, the three questions that qualify a visitor in thirty seconds, and the 48-hour follow-up window where trade show ROI is won or lost.
Read more
July 30, 2026Drayage Explained: The Trade Show Cost Nobody Warns You About
What material handling actually pays for, why it is billed per hundredweight, the surcharges that double estimates, and six decisions that genuinely reduce it.
Read more
July 23, 2026How to Choose the Right Trade Show for Your Business
Attendance numbers are close to useless on their own. Five questions that tell you whether a show will work, and how to build a portfolio instead of a list.
Read more
July 16, 2026The 12-Month Trade Show Planning Timeline
Every deadline that matters, counted backwards from show open — including the advance-order deadline that saves 20–40% and the 48-hour window that decides your ROI.
Read more
July 9, 2026Trade Show Booth Sizes Explained: 10x10 to Island
What each booth size actually gives you, the height and setback rules that catch first-timers, and how to size a booth from your staffing rather than your budget.
Read more
July 2, 2026What Does It Actually Cost to Exhibit at a Trade Show?
A line-by-line breakdown of the nine costs of exhibiting — including drayage and staff time, the two that blow up budgets and never appear in the quote.
Read more
June 10, 2026Top Trade Shows in Las Vegas in 2026
A guide to the biggest trade shows and exhibitor opportunities in Las Vegas through 2026 — dates, industries, exhibitor counts, and what each show is best for.
Read more- September 2, 2025tradeshows.fyi
Trade Shows Demystified: Your Ultimate Guide to Exhibiting, Attending, and Everything in Between
Introduction to Trade Shows Trade shows serve as significant events in various sectors, acting as a focal point
Read on tradeshows.fyi 
November 14, 2024tradeshows.fyi10 Essential Tips for Successfully Attending Trade Shows
10 Essential Tips for Attending Trade Shows Attending trade shows offers a unique platform to showcase products, network,
Read on tradeshows.fyi- November 13, 2024tradeshows.fyi
The Ultimate Trade Show Exhibitor Checklist: Planning, Preparation, and Execution
Trade Show Exhibiting Checklist Trade shows present a unique opportunity for exhibitors to showcase their products, network with
Read on tradeshows.fyi
Advertisement